Versum Materials, Inc. has introduced its new GASGUARD® eV Temperature Control System, designed to deliver reliable fabwide heat sourcing and control of electronic specialty gases that require heating to maintain or increase flow.
The new system integrates the GASGUARD gas delivery technology with an ECC heater/controller, two blankets and two heat traces, to deliver an integrated platform that can eliminate the concerns and time of specifying, installing and commissioning third-party equipment.
The system also allows fabs to scale their manufacturing with the assurance that the components of the delivery system will not need to be upgraded or replaced.
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