The Veriflo Division of Parker Hannifin Corporation has unveiled two ranges of ultra-high purity regulators specifically designed for semiconductor fabrication gas handling.
The FR 1000 Series and FR 1400 Series have been purposely developed for valve manifold boxes, point-of-use tool hook-up and gas cabinet applications in order to provide a precise and stable control of process gases in downstream functions.
Both devices feature a Hastelloy® C-22® diaphragm and poppet and metal-to-metal seals as standard on all models, which combine to provide increased cycle life, corrosion resistance and enhanced leak integrity.
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