Swagelok has released a new ultrahigh-purity diaphragm valve to deliver both the consistency and service life necessary for semiconductor fabricators to improve chip yields.
Dubbed the Swagelok® ALD7, the innovation can be integrated into either new tools or legacy equipment to provide improved flow capacity in the same 1.5inch footprint as existing valves.
With the launch, Swagelok said it hopes to help fabricators keep up with the strong global demand for semiconductor chips that power advanced technology.
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