Versum Materials, Inc. recently introduced its new GASGUARD® eV Temperature Control System, which is designed to deliver reliable fabwide heat sourcing and control of electronic specialty gases that require heating to maintain or increase flow.
gasworld spoke to Versum’s Offering Manager, DS Marketing, Kerry Lanza, about the significance of the GASGUARD® eV and Versum’s experience becoming a stand-alone company following its spin-off from Air Products and Chemicals, Inc., back in October 2016.
What does this technology mean for the specialty gases market?
It assures reliability of low vapour-pressure gases, that is, keeps the gas warm throughout the entire system and in a gaseous form and does not allow it to recondense back to a liquid. By enabling constant flow from the source to the tool our customers can maintain the desired process conditions which are critical for wafer-to-wafer process reliability.
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