The Electronics and Specialty Gases business of Linde North America recently commissioned a new carbon dioxide (CO2) purification unit at its electronics gases facility in Medford, Oregon.
Designed to produce CO2 with purity above 99.9997%, the production unit will provide primarily for the semiconductor industry and other electronics applications.
Linde’s Electronics and Specialty Gases business is a leading global supplier of a wide range of products – from high-purity nitrogen and rare gases to electronic process gases such as hydrogen chloride, sulfur hexafluoride and silane, to series of halocarbons. The company’s products are deployed across a number of industries and applications, including semiconductor manufacturing, the medical sector, scientific research, fibre optics, environmental testing and compliance, laser applications and lighting.
The Medford plant utilises a multiple-stage distillation process to produce several grades of CO2, including an ultra-low hydrocarbon grade for specialised on-wafer CO2 cleaning operations. This grade relies on a proprietary cylinder preparation process, which assures final hydrocarbons are at low part-per-trillion levels and are not deposited on wafer or mask surfaces – which in turn, would have a negative impact on yield.
... to continue reading you must be subscribed
