The new production facility, which will be operated by Air Products Korea Electronics, will produce more than 500 tonnes of NF3 per year when completed in late 2007. NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices.
On completion, Air Products global capacity will be more than 2500 tonnes annually. The company has a long history of gas manufacturing and has produced and distributed NF3 for more than 25 years from its manufacturing facility in Hometown, Pennsylvania.
‘The recent groundbreaking reinforces our commitment to our semiconductor and TFT-LCD customers around the globe that we will remain the world’s leading supplier of NF3’, said Corning Painter, Vice President, Electronics at Air Products.
Alongside new growth in its Asian projects, Air Products will continue to operate its three existing NF3 plants in Pennsylvania to ensure a reliable global supply of the product.
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