Through its majority owned joint-venture Air Liquide Far Eastern, Air Liquide has said that it will build new production capacities in the Science Parks of Tainan and Hsinchu, respectively located in the south and north of Taiwan.
Under a long-term commitment with a semiconductor market leader, the investment in new production capacity will allow the group to supply three high volume semiconductor fabrication plants under construction in Tainan Science Park, as well as some of the most advance R&D fabs for logic IC chips in Hsinchu Science Park.
The investment which cost almost €200m will see Air Liquide build, own and operate ultra-high purity hydrogen and oxygen plants in each basin for a total of 5,000 Nm3 of hydrogen per hour and two large scale plants in Hsinchu to produce high-purity nitrogen and argon, for an additional capacity of 120,000 Nm3 of high purity nitrogen per hour.It will also supply large volumes of helium to the fabrication plants.
The first plants are expected to begin operations during the second quarter of 2021 to support the customer’s multi-billion-dollar wafer fabs expansion.
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